Mass Dependence of the Sputtering Yield-Boundary Effect
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概要
- 論文の詳細を見る
A simple model is used to study the dependence of the sputtering yield on theincident atomic number (Z.). Scatterings between incident and target atomsare classified into two types, that is, large and small angle scatterings. Large anglescatterings are represented by random walks with a certain energy loss and smallangle scatterings by another certain energy loss. The range distribution derivedfrom this model is compared with other rigorous calculations. Sigmund's theoryconsiderably overestimates the sputtering yield in the region where M.>>A#.,7V1 and M. the mass of incident and target atoms respectively. Our simple modelexplains this as a surface botmdary effect, i.e., as an effect due to escaping ofenergetic atoms from the surf'ace.
- 社団法人日本物理学会の論文
- 1978-12-15
著者
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Imada Masatoshi
Department Of Applied Physics University Of Tokyo
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Imada Masatoshi
Department Of Physics Faculty Of Science University Of Tokyo
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