On the Floating Probe Method for the Measurement of Ionized Gas
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概要
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Several problems connected with the floating probe method are discussed and solved. Analysing the variation of ion current due to sheath expansion, the authors obtain the criterion for applicability of the usual double probe method and also the general expression available for the estimation of electron temperature. From the relation between probe characteristic and electron energy distribution, a floating triple method is newly proposed. This method is useful for the measuring of energy distribution in electrodeless or h.f. discharges. By special use of the floating double or triple probe, the measurement of potential distribution in such a quasi-plasma as ion sheath and the transition region between plasma and ion sheath can be attained. As one example, the floating potential becomes measurable. The floating, or insulating, potential is discussed in detail and expression is given showing good agreement with measured values.
- 社団法人日本物理学会の論文
- 1956-01-05
著者
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Okuda Takayoshi
Faculty Of Engineering Nagoya University
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Yamamoto Kenzo
Faculty Of Engineering Nagoya University
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YAMAMOTO Kenzo
Faculty of Engineering, Nagoya University
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