Nonequilibrium Argon Induction Plasmas by a Two-Temperature Model

概要

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The nonequilibrium behavior of induction argon plasmas at a pressure 1.0 aim isstudied by means of a two-temperature model. The results are compared with Stokes'experiments and with the LTE plasmas. The agreement with the experiments is wellimproved compared with the agreement using the LTE theory. The electron temper-ature has an off-axial peak in the profile and deviates considerably from the heavy gastemperature in the outer region. On the other hand, the temperature difference be-tween them in the central region is fairly small even for relatively low axialtemperatures. Although for a low power discharge the gas temperature decreasesmonotonically toward the wall, it drops but is slightly higher than the electrontemperature in the central region, when the discharge power increases.
社団法人日本物理学会の論文
1986-06-15