Threshold and Energy Distribution for ECR Discharge Plasma Source
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概要
- 論文の詳細を見る
An ECR discharge plasma source obtained through the use of ferrite magnets wasstudied especially focusing on the threshold electric field at the breakdown and theenergy distribution of charged particles in the plasma produced. The microwave frequency was a little smaller than the electron cyclotron frequency by about 0.5 X 1 %,which was explained clearly by the electron trapping condition. The energy distribu-lion of electrons has the second harmonic and strongly depends on the localizing ofthe microwave field.
- 社団法人日本物理学会の論文
- 1987-10-15
著者
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IKEZAWA Shunjiro
Department of Electronic Engineering, College of Engineering, Chubu University
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ISHIZAKI Yoshiaki
Department of Orthopedic Surgery,Osaka City University Medical School
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Ishizaki Yoshiaki
Department Of Electronic Engineering Chubu University
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YAMAZUMI Tomiya
Department of Electronic Engineering,Chubu University
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Yamazumi Tomiya
Department Of Electronic Engineering Chubu University
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Ikezawa Shunjiro
Department Of Electronic Engineering Chubu University
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Ikezawa Shunjiro
Department Of Electronic Engineering Chubu Institute Of Technology
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IKEZAWA Shunjiro
Department of Electrical and Electronic Engineering, Graduate School of Engineering, Chubu University, Kasugai, Aichi 487-8501, Japan
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Ishizaki Yoshiaki
Department of Chemistry, Faculty of Science, The University of Tokyo
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