Measurement of Complex Refractive Index of Tungsten by Using Ellipsometry : Study of the Accuracy of Ellipsometer

概要

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Tungsten microcavity light sources and tungsten cluster light sources have interested us as light sources for next-generation having high luminous efficacy and long lifetime. The complex refractive index of tungsten requires the operating temperatures from 2000K to 6500K to evaluate the luminous efficacy and lifetime. Little is, known however, about the complex index of tungsten at such high temperatures. Since ellipsometry has a non-contact measurement technique, the complex refractive index of any metal can be measured even under extremely high temperature with high accuracy. We consider that ellipsometry is an effective measuring method. We thus designed and fabricated the ellipsometer to measure the complex refractive index of tungsten at room temperature. As the result, we established the ellipsometer improved from measurement of the complex refractive index of tungsten from 2000K to 6500K. In this paper, we report on the problems to measure the complex refractive index of tungsten using the ellipsometry, and the achieved accuracy of measurement.
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