超小型放電加工機の重畳用圧電素子による性能の改善

概要

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A pocket-size electro-discharge machine of which electrode-feeding is done by using two piezoelectric elements has been developed. One piezo makes inertial force for the Impact Drive Mechanism (IDM). The other piezo adjusts a gap length between an electrode and a workpiece, or forces an electrode to vibrate. To improve the machining performance of the pocket-size electro-discharge machine, forced vibration of an electrode (Vibration method) and the electrode-feeding with fine step of 10 nm (Interpolation method) are examined by using the additional piezo. By the vibration method, the machining time is decreased to 67 % of that without the additional piezo. By the interpolation method, which can make the resolution of the precise positioning mechanism utilizing the IDM finer, the machining time is decreased to 74 %.
公益社団法人精密工学会の論文
1992-03-05