超精密加工用変位テーブルの開発とそれを用いた面形状創成

概要

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This paper describes a positioning system and reports experimental results of curved-surface form generating by using the system. In order to control the shape accuracy of ultra-precision grinding surfaces, a displacement table and its control system have been developed. The displacement table has three stacked piezoelectric ceramic actuators as actuators and three non-contact capacitive displacement transducers as sensors. In the grinding process, a microcomputer dynamically and precisely controls the positioning displacement table so that it changes the relative position of the ground surface and grinding wheel. It is confirmed that three-dimensional curved surfaces whose radius of curvature is very large can be precisely generated by using the displacement table and its control system. Thus, it is expected that mirror surfaces having high shape precision can be ground on conventional grinding or cutting machines such as machining centers or plane surface grinding machines by attaching the system to them.
公益社団法人精密工学会の論文
1991-07-05