精密円筒研削における機上真円度測定システムの開発

概要

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The present paper describes a newly developed in-situ measuring system of the circularity of a workpiece in cylindrical grinding. The principle of the measurement is based on Three-Point Method. In this system, however, apparent runouts of a ground surface are measured at various angular positions by using only one displacement detector, which can be displaced around the workpiece axis with a stepping motor and in the radial direction with a piezo-actuator. In order to improve the measuring accuracy, the circularity profiles are determined by averaging five different measurements. By applying the developed system to a cylindrical grinding machine, it has been confirmed that the measured circularity profiles are in good agreement within submicron accuracy with those measured by using a circularity measuring instrument.
公益社団法人精密工学会の論文
1990-05-05