セラミック製空気静圧送りねじの開発

概要

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An air bearing lead screw and nut have been developed for application to ultra-precise positioning over long strokes. The design features are : (1) Porous restrictors made of ceramic materials with surface plating are applied to the flanks of the nut threads. (2) The thread profile is square to improve its machining accuracy and this minimizes bearing clearance. Performances of the air bearing lead screw and nut were examined with a fully air-lubricated one-dimensional linear table. Primary results for a lead screw with a nominal diameter of 25 mm are : (1) The axial stiffness is over 30 N/μm with 0.5 MPa supply pressure. (2) Precision of the nut linear motion is evaluated to be 5 nm. (3) Lead accuracy is improved more than 10 times compared to the machining accuracy of lead screws. These results demonstrate that the air bearing lead screw and nut is a practical approach for micropositioning with ultra-fine accuracy.
社団法人精密工学会の論文
1990-12-05