超精密位置決め用回転アクチュエータの開発 : 第3報, 整定時間と回転速度の改良

概要

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The study deals with the improvement of the settling time and rotational speed of a highly accurate rotational positioning actuator developed on the basis of the "Inchworm translator". The actuator consists of piezoelectric actuators for rotation and fixture and rotational circuler plates, and has a rotational resolution of about 10^<-6>rad. However, its settling time and rotational speed are very slow because of data processing overloads of a 32 bits personal computer as a controller. In order to reduce the overloads, an electric card in place of a program is used as a way how the computer generates timinig pulse signals for piezoelectric actuators. As a results, the data processing responce of the computer becomes speedy, and the setting time is able to be reduced from 12 sec to 0.34 sec. In addition, the rotational speed is able to be improved to 1.3 times faster than the previous one, by adjusting timing of pulse signals.
1996-10-31