<論文>水作動液を用いた静圧軸受の基礎研究
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概要
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Hydro-static bearings have been used in various precision machines, and gas or hydraulic oil is applied according to required bearing capability as pressure fluid. Both of them have merits and demerits. Normal water should be suitable fluid when cleanness and load capacity are necessary like semi-conducter manufacturing. And also characteristics of heat generation and conduction of water will perform better than oil at the point of accuracy maintenance. Usually, characteristics of hydro-static bearing are calculated regarding fluid behave as viscous flow or orifice flow in case of oil, and it is questionable to consider water behave like oil. In this study, new design rule for fluid-static bearing is investigated and proposed from the basic experimental results.
- 1997-01-31
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