A Simulation on Dissociation Process of NO_x Gas by RF Discharge

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概要

• 論文の詳細を見る

• In this paper, the authors simulate a dissociation process of NO_2 gas by RF discharge. Chemical reation formulars were proposed to infer the dissociation process from change of the number of particles with reation time in our previous paper. The dissociation process simulation based on chemical kinetics is carried out to verify the reliability of the chemical reaction formulas proposed here. The dissociation process of NO_x gases is investigated through experiments using the emission and the infrared spectroscopic methods. The changes of each particle according to the reaction time in the dissociation process simulation are compared with experimental results. Consequently, it is clarified that the chemical reaction formulas show approximately the dissociation process of NO_2 gas by RF discharge.

• 東海大学の論文

著者

• Kudo Masaya

  Course Of Electrical Engineering Graduate School Of Engineering. (kaijo Corporation.)

• OKABE Shozo

  Department of Electrical Engineering, School of Engineering

• NAGAOKA Masaki

  Course of Electrical Engineering, Graduate School of Engineering

• Nagaoka Masaki

  Course Of Electrical Engineering Graduate School Of Engineering

• Okabe Shozo

  Department Of Electical Engineering School Of Engineering

関連論文

• A Simulation of the Positive Corona Pulse Current in SF_6
• A Simulation on Dissociation Process of NO_x Gas by RF Discharge
• A Simulation of Positive Corona Discharge in SF_6 Gas by Means of Multichannel Model
• A Fundamental Study on the Reaction Process of NO_x by Radio Frequency Discharge
• A Simulation of the Negative Corona Discharge in the Gas Mixture (SF_6,N_2,c-C_4F_8)

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