Effect of Hydrogen Reduction on Characteristics of Cu Thin-Films Deposited by RF-Driven Ar/H_2 Atmospheric Pressure Plasma Jet
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概要
- 論文の詳細を見る
- 2012-05-25
著者
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Ogino Akihisa
Graduate School Of Electronic Science And Technology Shizuoka University
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Nagatsu Masaaki
Graduate School Of Engineering Nagoya University
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Meng Yuedong
Institute Of Plasma Physics Chinese Academy Of Sciences
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Zhao Peng
Graduate School Of Science And Technology Shizuoka University
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NAKAHIRO Hisashi
Graduate School of Engineering, Shizuoka University
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ZHENG Wei
Research and Technology Center, Yazaki Corporation
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Nakahiro Hisashi
Graduate School Of Engineering Shizuoka University
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Zheng Wei
Research And Technology Center Yazaki Corporation
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Ogino Akihisa
Graduate School Of Engineering Shizuoka University
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Nagatsu Masaaki
Graduate School of Electronic Science and Technology, Shizuoka University, Hamamatsu 432-8011, Japan
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Meng Yuedong
Institute of Physics of Plasma, Chinese Academy of Sciences, Hefei 230031, China
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