Dynamic characteristics and dual control of a ball screw drive with integrated piezoelectric actuator
スポンサーリンク
概要
- 論文の詳細を見る
This paper describes the precision continuous path tracking control by using a dual-actuated single stage. First, fine-drive mechanism and the dynamic model of the entire drive system are described. In the simulation model, the dynamic characteristic of the dual-actuated stage is investigated to see whether it can provide precise motion by using dual control. Second, the fine motion controller is designed. Adjusting the control parameters, a positioning resolution of 20 nm and a bandwidth of 260 Hz were obtained. Third, the frequency responses of coarse and fine drives are experimentally investigated. After that, the dual controller is designed based on the investigated dynamics. Finally, whether coarse motion and fine motion could work complimentarily by the dual servo is examined in the experiments. By using the simultaneous dual controller, tracking errors were reduced sufficiently compared to the single coarse control.
- 2010-01-01
著者
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Yamaji Iwao
Dep. Of Micro Engineering Kyoto Univ. Yoshida-honmachi Sakyo-ku Kyoto 606-8501 Jpn
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Kono Daisuke
Department Of Physiology Jichi Medical School
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Matsubara Atsushi
Department Of Micro Engineering Graduate School Of Engineering Kyoto University
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Yamaji Iwao
Department Of Micro Engineering Graduate School Of Engineering Kyoto University
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Fujita Tomoya
Department Of Micro Engineering Graduate School Of Engineering Kyoto University
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Kono Daisuke
Department Of Micro Engineering Graduate School Of Engineering Kyoto University
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MATSUBARA Atsushi
Department of Chemical Engineering, Nagoya University
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