Hydrogenated Amorphous Silicon Carbide Optical Waveguide for Telecommunication Wavelength Applications

概要

論文の詳細を見る
We have proposed and demonstrated hydrogenated amorphous silicon carbide (a-SiC:H) optical waveguides for telecommunication wavelength applications. A cut-back measurement shows low propagation loss for single-mode waveguides of $550\times 200$ nm2. In addition to low optical absorption, a-SiC:H films exhibit a lower refractive index of approximately 3.1 than that of amorphous silicon, which reduces the scattering loss at the sidewall surface owing to the reduced refractive index difference between the core and the clad. Furthermore, the capability of a-SiC:H to continuously tune the refractive index facilitates further reduction in the propagation loss, making it a promising optical waveguide material.
Japan Society of Applied Physicsの論文
2010-12-25