Miniaturization of a Laser Doppler Blood Flow Sensor by System-in-Package Technology : Fusion of an Optical Microelectromechanical Systems Chip and Integrated Circuits

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概要

• 論文の詳細を見る
• 2010-03-01

著者

• Higurashi Eiji

  Research Center For Advanced Science And Technology The University Of Tokyo

• Higurashi Eiji

  Research Center For Advanced Science And Technology University Of Tokyo

• Iwasaki Wataru

  Graduate School Of Systems Life Sciences Kyushu University

• Sawada Renshi

  Graduate School Of Systems Life Sciences Kyushu University

• NOGAMI Hirofumi

  Graduate School of Systems Life Sciences, Kyushu University

• Nogami Hirofumi

  Graduate School Of Systems Life Sciences Kyushu University

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• Void Free Room Temperature Silicon Direct Bonding by Sequential Plasma Activated Process
• Miniaturization of a Laser Doppler Blood Flow Sensor by System-in-Package Technology : Fusion of an Optical Microelectromechanical Systems Chip and Integrated Circuits
• Maskless Lithographic Fine Patterning on Deeply Etched or Slanted Surfaces, and Grayscale Lithography, Using Newly Developed Digital Mirror Device Lithography Equipment
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