Properties of Transparent Conductive Ga-Doped ZnO Films on Glass, PMMA and COP Substrates
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概要
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The dependences of the structural, optical and electrical properties of highly transparent conductive Ga-doped ZnO (GZO) films on thickness have been studied. GZO films were prepared on unheated glass, polymethyl methacrylate (PMMA) and cyclo olefin polymer (COP) substrates by ion plating deposition with direct-current arc discharge. Polycrystalline GZO films with good adherence to a substrate having a (0002) preferred orientation have been obtained. Very little difference was found between the resistivity values of the GZO films on the glass substrate and those of the GZO films on the different polymer substrates, at any given film thickness. On both plastic substrates, the resistivity of the GZO films decreased from 2×10-3 to 5×10-4Ωcm with increasing film thickness.
- （社）電子情報通信学会の論文
- 2008-10-01
著者
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YAMAMOTO Tetsuya
Materials Design Center, Research Institute, Kochi University of Technology
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MIYAKE Aki
Materials Design Center, Research Institute, Kochi University of Technology
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YAMADA Takahiro
Materials Design Center, Research Institute, Kochi University of Technology
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MORIZANE Toshiyuki
Materials Design Center, Research Institute, Kochi University of Technology
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ARIMITSU Tetsuhiro
Materials Design Center, Research Institute, Kochi University of Technology
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MAKINO Hisao
Materials Design Center, Research Institute, Kochi University of Technology
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YAMAMOTO Naoki
Materials Design Center, Research Institute, Kochi University of Technology
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Arimitsu Tetsuhiro
Materials Design Center Research Institute Kochi University Of Technology
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Morizane Toshiyuki
Materials Design Center Research Institute Kochi University Of Technology
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Yamamoto Naoki
Kochi Univ. Tech. Kochi Jpn
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Yamamoto Tetsuya
Kochi Univ. Tech. Kochi Jpn
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Yamamoto Tetsuya
Materials Design Center Research Institute Kochi University Of Technology
関連論文
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