Design and Fabrication of a Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes
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概要
- 論文の詳細を見る
- 2009-05-01
著者
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Sugano Koji
Department Of Micro Engineering Kyoto University
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HAMAGUCHI Hiroyuki
Department of Orthopaedics, Graduate School of Medical Science, Kyoto Prefectural University of Medi
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Hamaguchi Hiroyuki
Department Of Micro Engineering Kyoto University
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Hamaguchi Hiroyuki
Department Of Hematology And Oncology Musashino Red Cross Hospital
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Tsuchiya Toshiyuki
Department Of Micro Engineering Kyoto University
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Tabata Osamu
Department Of Micro Engineering Kyoto University
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Tabata Osamu
Department Of Circulation And Respiration The Research Institute Of Environmental Medicine Nagoya Un
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