電子線をラインスキャンし刺激脱離させたイオン結晶表面のモフォロジー

概要

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Surfaces of KCl crystals irradiated uniformly by scanning of 5 keV beam of electrons collimated with one direction are observed by an atomic force microscope (AFM). The irradiation doses are in the range up to 1016 cm-2. The surfaces remain many overlapped terraces of sub-micron with random orientations. They are hard to be associated with the square pits observed in well known layer by layer desorption measurements in the dose range of 1014 cm-2. The desorption process is simulated by a model based on the assumption that the low-coordinated sites act as the precursors for desorption. We have introduced parameters into this model to reproduce the oscillating structure of the particle-yields of the layer by layer desorption. The resulting final morphology in the dose range of 1016 cm-2 shows that many overlapped terraces are created with random orientations, whose terrace-lengths are small compared with that observed. The morphologies show that the process assumed to reproduce the layer by layer desorption can lead the multi-layer steps on the surface.
2009-07-20