プラズマ支援重合法による高分子薄膜へのヘテロ原子の導入と薄膜の光学特性

概要

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Plasma enhanced polymerization is an attractive technology to fabricate an optical polymer waveguide, because it has capability to provide an uniform thickness film on a substrate with various surface geometry, and to provide change of refractive index by controlling a proportion of source monomer mixing. In the present paper we discuss optical constants and molecule structures of the films added hetero-atoms, O, N and F in the CHx network of polymer. Refractive index of those films changes from 1.52 to 1.63 at 1.0 μm wavelength, depending on the variety of hetero-atoms. Fluorine atoms added into a film decreases refractive index of the film. Oxygen atoms added into a film, which form ester structure (- COO-), decrease refractive index of the film, and some O atoms token into a film as OH base will increase optical absorption in inferred region for optical communication. Nitrogen atoms added increase optical absorption due to forming NH2 base. Finally, sp3/sp2 fraction controlling in the film will be a suitable to control refractive index of the film for an optical waveguide, for example by using mixed monomer of C6H6 and C6H10.
社団法人電気学会の論文
2009-08-01