High-Q Piezoelectrically Actuated RF MEMS Tunable Capacitor
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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ITAYA Kazuhiko
Advanced Semiconductor Devices Research Laboratories, R&D Center, Toshiba Corporation
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NISHIGAKI Michihiko
Advanced Electron Devices Laboratory, Corporate Research & Development Center, Toshiba Corporation
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NAGANO Toshihiko
Advanced Electron Devices Laboratory, Corporate Research & Development Center, Toshiba Corporation
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MIYAZAKI Takashi
Advanced Electron Devices Laboratory, Corporate Research & Development Center, Toshiba Corporation
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KAWAKUBO Takashi
Toshiba Research Consulting Corporation
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NAGANO Toshihiko
Toshiba Corporation, Corporate Research and Development Center
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NISHIGAKI Michihiko
Toshiba Corporation, Corporate Research and Development Center
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Kawakubo Takashi
Toshiba Res. Consulting Corp. Kawasaki Jpn
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Nagano Toshihiko
Toshiba Corporation Corporate Research And Development Center
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Itaya Kazuhiko
Toshiba Corporation Corporate Research And Development Center
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Nishigaki Michihiko
Toshiba Corporation Corporate Research And Development Center
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Miyazaki Takashi
Advanced Electron Devices Laboratory Corporate Research & Development Center Toshiba Corporation
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- High-Q Piezoelectrically Actuated RF MEMS Tunable Capacitor
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