Characterization of Embedded Poly-Heater PMOSFETs and its Application on In-Line Wafer Level NBTI Monitor
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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CHEN M.
Department of Electrical and Electronic Engineering, Gifu University
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Wang C.
Quality And Reliability Assurance Div. United Microelectronics Corp.
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Chang W.
Quality And Reliability Assurance Div. United Microelectronics Corp.
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KE W.
Quality and Reliability Assurance Div., United Microelectronics Corp.
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CHIANG C.
Quality and Reliability Assurance Div., United Microelectronics Corp.
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LEE C.
Quality and Reliability Assurance Div., United Microelectronics Corp.
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SU K.
Quality and Reliability Assurance Div., United Microelectronics Corp.
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Ke W.
Quality And Reliability Assurance Div. United Microelectronics Corp.
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Chen M.
Department Of Electrical And Electronic Engineering Gifu University
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Chiang C.
Quality And Reliability Assurance Div. United Microelectronics Corp.
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