Successful CMOS Operation of Dopant-Segregation Schottky Barrier Transistors (DS-SBTs)
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概要
- 論文の詳細を見る
- 2004-09-15
著者
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Yagishita A.
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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KINOSHITA A.
Advanced LSI Technology Laboratory, Corporate R&D Center, Toshiba Corporation
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TSUCHIYA Y.
Advanced LSI Technology Laboratory, Corporate R&D Center, Toshiba Corporation
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UCHIDA K.
Advanced LSI Technology Laboratory, Corporate R&D Center, Toshiba Corporation
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KOGA J.
Advanced LSI Technology Laboratory, Corporate R&D Center, Toshiba Corporation
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Yagishita A.
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.
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Koga J.
Advanced Lsi Technology Laboratory Toshiba Corporation
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