反応性スパッタ法による酸化ビスマス薄膜の堆積とレーザー照射による光学特性変化

概要

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BiOx films were prepared on the glass and polycarbonate substrates by reactive rf magnetron sputtering using Bi target with the aim of application to optical recording. It was found from XRD patterns and XPS spectra that both metallic Bi and Bi2O3 crystalline phases coexist in the deposited film under conditions with proper O2 flow. XPS spectra after annealing showed the enhancement of spacial phase separation into Bi and Bi2O3 phases. Reflectivity enhancement of BiOx films on the glass and polycarbonate substrates after annealing revealed optical recording ability for blue laser irradiation. Prepared disk with film under proper sputtering condition achieved CNR of 45.7 dB for 405 nm laser irradiation with power of 3 mW.
日本真空協会の論文
2008-03-20