Detection of Formaldehyde Using a Pt/γ-Al_2O_3-Based Adsorption/Combustion-Type Sensor
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概要
- 論文の詳細を見る
An adsorption/combustion-type gas sensor employing Pt/γ-Al2O3 with low heat capacity was fabricated by MEMS process on a silicon substrate. The sensor was driven by pulse heating between 25°C and 200°C. The sensor showed a large response peak to formaldehyde due to its combustion upon pulse heating during a period of 0.4 s after room temperature adsorption for 20 s. The sensor detected formaldehyde of any concentration in the range of 40-400 ppb, and interference from high boiling point compounds was less important.
- 社団法人 電気学会の論文
- 2008-04-01
著者
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Egashira Makoto
Faculty Of Engineering Nagasaki University
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TAKAHASHI NOBUYUKI
Research & Development Division, Taiko Refractories Co., Ltd.
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SASAHARA Takahiko
Research and Technology Center, Yazaki Corp.
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Takahashi Nobuyuki
Research And Technology Center Yazaki Corp.
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Sasahara Takahiko
Research And Technology Center Yazaki Corp.
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