Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry
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概要
- 論文の詳細を見る
- 2006-01-01
著者
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Wang S.
Department Of Electrical Engineering National University Of Kaohsiung
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Tay C.
Department Of Mechanical Engineering National University Of Singapore
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QUAN C.
Department of Mechanical Engineering, National University of Singapore
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