反応性プラズマ溶射法による窒化アルミニウム皮膜の作製と特性評価

概要

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Aluminum nitride (AlN) has excellent properties such as high corrosion resistance, hardness and thermal conductivity. In this study, AlN coatings were fabricated by reactive plasma spraying by using Al-AlN mixed powder for feedstock. The optimal mixing ratio of Al-AlN particles and spray conditions were investigated. Al-AlN particles were injected into Ar/N2 plasma and were deposited onto graphite substrate. It was possible to fabricate the coatings using Al-10∼40 wt.%AlN powders for feedstock. Especially, using Al-20 wt.%AlN and Al-30 wt.%AlN powders enabled to fabricate dense coatings which consisted of almost completely AlN phase. The nitride phase concentration in the coatings was controlled by RF power and N2 gas flow rate in the plasma gas. Furthermore, it became clear that the hardness of the coatings depended on the nitride concentration in the coatings. The thermal conductivity of the coating was achieved 71.2 (W/m•K). Therefore, it was possible to fabricate AlN based coatings with high thermal conductivity by reactive plasma spraying by using Al-AlN mixed powder.
2007-06-20