セラミックス薄膜焼成用スラリーのレオロジーコントロール

概要

論文の詳細を見る
Since the micro-structure of sintered film of ceramics strongly depends on the geometrical distribution of particles and the interparticle attractions in slurry, it is important to control the rheological properties of ceramic slurries for formation of thin sintered film with high density. The relationship among the rheology of slurries, film forming properties, and micro-structure of sintered film were studied to establish the technology of producing thin ceramics films by casting and sintering. The rheological properties of PZT slurries were controlled by the additions of surfactant and binder polymer. The polymer chain may attach to the surface at many points and not be able to desorb simultaneously from all sites. Hence, bridging flocculation is essentially irreversible in ordinary conditions. When the polymers do not have strong affinity for the particle surface, the adsorption-desorption and reversibly takes place by thermal energy. Therefore, the slurries behave as liquids at long times. The sintered films of PZT(lead zirconate titanate) at a thickness of about 10μm were formed by formulating the slurries in which the particles are weakly flocculated by reversible bridging.
日本レオロジー学会の論文
2001-12-01