Effect of SF_6 and N_2 Inclusion on Ar Inductively Coupled Plasma

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概要

• 論文の詳細を見る
• 1997-10-30

著者

• Cliteur G

  Toshiba Corp.

• Cliteur G.j.

  (株)東芝

• Paul K.

  Faculty Of Engineering Kanazawa University

• SAKUTA T.

  Faculty of Engineering, Kanazawa University

• CLITEUR G.

  Heavy-Engineering Laboratory, Toshiba Corporation

• SUZUKI K.

  Heavy-Engineering Laboratory, Toshiba Corporation

• Sakuta T

  Kanazawa Univ. Kanazawa Jpn

• Sakuta T.

  Faculty Of Engineering Kanazawa University

関連論文

• Experimental/Theoretical Diagnosis of Inductively Coupled Pulse Modulated Plasma
• Spectroscopic Measurements of SF_6 and N_2 Induction Plasmas at Atmospheric Pressure
• Ar高周波誘導プラズマを用いたSF_6及びN_2消弧ガスの基礎特性評価
• On the determination of the multi-temperature SF_6 plasma composition
• Effect of SF_6 and N_2 Inclusion on Ar Inductively Coupled Plasma
• A Kinetic Radiation Model for a Decaying SF_6/N_2 Arc Plasma
• Properties of rf Inductively Coupled SF_6 Plasma Contaminated with Cu Vapor
• Modeling of Ar Induction Thermal Plasma with an Injection of PTFE Powder
• Synthesis of Fullerene with C-Si Mixed Particles by Using Induction Thermal Plasma

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