Experimental/Theoretical Diagnosis of Inductively Coupled Pulse Modulated Plasma
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概要
- 論文の詳細を見る
- 1999-01-24
著者
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Paul K
Department Of Electrical & Computer Engineering Kanazawa University
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PAUL K.
Electrical & Computer Engineering Department, Kanazawa University
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KATSUKI M.
Electrical & Computer Engineering Department, Kanazawa University
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TANAKA Y.
Electrical & Computer Engineering Department, Kanazawa University
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SAKUTA T.
Electrical & Computer Engineering Department, Kanazawa University
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Paul K
Kanazawa Univ.
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Sakuta T
Kanazawa Univ. Kanazawa Jpn
関連論文
- Experimental/Theoretical Diagnosis of Inductively Coupled Pulse Modulated Plasma
- Spectroscopic Measurements of SF_6 and N_2 Induction Plasmas at Atmospheric Pressure
- Ar高周波誘導プラズマを用いたSF_6及びN_2消弧ガスの基礎特性評価
- SF_6誘導熱プラズマを用いた消弧性能の検証法
- Ar-SF_6混合プラズマの特性とCu, PTFE粒子混入の影響
- On the determination of the multi-temperature SF_6 plasma composition
- Effect of SF_6 and N_2 Inclusion on Ar Inductively Coupled Plasma
- A Kinetic Radiation Model for a Decaying SF_6/N_2 Arc Plasma
- Modeling of Ar Induction Thermal Plasma with an Injection of PTFE Powder
- Synthesis of Fullerene with C-Si Mixed Particles by Using Induction Thermal Plasma