SAKUTA T. | Faculty of Engineering, Kanazawa University
スポンサーリンク
概要
関連著者
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Paul K.
Faculty Of Engineering Kanazawa University
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SAKUTA T.
Faculty of Engineering, Kanazawa University
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Sakuta T.
Faculty Of Engineering Kanazawa University
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Cliteur G
Toshiba Corp.
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Cliteur G.j.
(株)東芝
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CLITEUR G.
Heavy-Engineering Laboratory, Toshiba Corporation
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SUZUKI K.
Heavy-Engineering Laboratory, Toshiba Corporation
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Sakuta T
Kanazawa Univ. Kanazawa Jpn
著作論文
- Effect of SF_6 and N_2 Inclusion on Ar Inductively Coupled Plasma
- Properties of rf Inductively Coupled SF_6 Plasma Contaminated with Cu Vapor