Large Deflection Electrostatic Spiral Actuator with Twisted-beams

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概要

• 論文の詳細を見る

• In this paper, we propose a large-deflection electrostatic spiral-actuator with novel twisted-beams fabricated by surface micromachining. The stress-induced or bimetal-like actuators have merits of simple structure and fabrication steps with relatively large stroke. The novel stress-induced actuator presented here is composed of “twisted-beams", which have not only out-of-plane curvature but also rotation along its longitudinal direction. When the twisted-beams are used as components of a spiral actuator, the total stroke of the actuator becomes a sum of each deflection of the beams, and the stroke is much larger than conventional stressinduced spiral actuators. The experimental results of the spiral actuator show the maximum deflection of about 750 μm, which is extremely large for stress-induced-actuators.

• 社団法人 電気学会の論文
• 2006-07-01

著者

• Fujita Takayuki

  Department of Medical Science and Cardiorenal Medicine, Yokohama City University Graduate School of

• MATSUSHITA Yuko

  Department of Applied Chemistry, Faculty of Engineering, Nagasaki University

• Matsushita Yuko

  Department Of Applied Chemistry Faculty Of Engineering Nagasaki University

• Matsushita Yuko

  Department Of Electrical Engineering And Computer Sciences Graduate School Of Engineering University

• Fujita Takayuki

  Department Of Electrical Engineering And Computer Sciences Graduate School Of Engineering University

• OKAMOTO Sachiya

  Department of Electrical Engineering and Computer Sciences, Graduate School of Engineering, Universi

• SHIMAMOTO Nobuaki

  Department of Electrical Engineering and Computer Sciences, Graduate School of Engineering, Universi

• MAENAKA Kazusuke

  Department of Electrical Engineering and Computer Sciences, Graduate School of Engineering, Universi

• TAKAYAMA Yoichiro

  Department of Electrical Engineering and Computer Sciences, Graduate School of Engineering, Universi

• Okamoto Sachiya

  Department Of Electrical Engineering And Computer Sciences Graduate School Of Engineering University

• Shimamoto Nobuaki

  Department Of Electrical Engineering And Computer Sciences Graduate School Of Engineering University

• Takayama Yoichiro

  Department Of Electrical Engineering And Computer Sciences Graduate School Of Engineering University

• Maenaka Kazusuke

  Department Of Electrical Engineering And Computer Sciences Graduate School Of Engineering University

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