Novel Micro Gyroscope with High-Q Rotational Vibration Structure

概要

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A rotational vibrating disk with a high Q value was proposed and applied to a micro gyroscope. This structure consists of a disk surrounded by four pendulums mounted at 90° increments. When rotationally resonant vibration is induced in the disk, there is an unmoving point on each arm of pendulums. When this point, a nodal point, is clamped, the vibratory energy loss was able to be reduced. This structure achieves a very high Q value of 85,000 in a vacuum. We used this rotational mode as a reference vibration for a vibratory gyroscope. The excitation of the vibration was induced by electrostatic forces. Electrodes were placed adjacent to the lower portion of the disk to measure the angular rate. The electrodes established a capacitance between themselves and the disk. The Coriolis force produces a displacement of the disk and this displacement varies the detection capacitance. Measuring the change in capacitance allowed for the measurement of the angular rate.This paper describes the design and fabrication of the proposed device along with some results and observations.
社団法人電気学会の論文
2005-08-01