Al-Selective CVD Induced by Hydrogen Desorption on Si
スポンサーリンク
概要
- 論文の詳細を見る
- 1995-08-21
著者
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SHINGUBARA S.
Dept. of Electrical Eng. Hiroshima Univ.
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Shingubara S.
Graduate School Of Adsm Hiroshima University
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Sakaue H.
Graduate School Of Adsm Hiroshima University
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Katsuta Y.
Dept. Of Electrical Engineering Hiroshima University
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SAKAUE H.
Dept. of Electrical Engineering, Hiroshima University
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KONAGATA S.
Dept. of Electrical Engineering, Hiroshima University
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TAKAHAGI T.
Dept. of Electrical Engineering, Hiroshima University
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Konagata S.
Dept. Of Electrical Engineering Hiroshima University
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Takahagi T.
Graduate School Of Adsm Hiroshima University
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- Wafer-Scale Self-Organization of Periodic Step/Terrace Structure on Hydrogen-Terminated Si Surface
- Scanning Tunneling Microscopy Observation on the Atomic Structures of Step Edges and Etch Pits on NH_4F-Treated Si(111) Surface
- In-Situ Observation of Silicide Formation on Hydrogen-Terminated Si Surface by UHV-STM and LEED
- Fabrication of a Si Nanometer Column pn Junction and Implanted Damage Evaluation by TEM