Wafer-Scale Self-Organization of Periodic Step/Terrace Structure on Hydrogen-Terminated Si Surface
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概要
- 論文の詳細を見る
- 1998-09-07
著者
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Tanaka T.
Dept. Obst. and Gynec., Hokkaido Univ. Sch. Med.
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Fujiwara S.
Dept. of Biol., Fac. of Sci., Kochi Univ.
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SHINGUBARA S.
Dept. of Electrical Eng. Hiroshima Univ.
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Shingubara S.
Graduate School Of Adsm Hiroshima University
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Sakaue H.
Graduate School Of Adsm Hiroshima University
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SAKAUE H.
Dept. of Electrical Engineering, Hiroshima University
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TAKAHAGI T.
Dept. of Electrical Engineering, Hiroshima University
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Takahagi T.
Graduate School Of Adsm Hiroshima University
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