Effect of Cap-Metals on Co Salicide Process

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概要

• 論文の詳細を見る
• 1996-08-26

著者

• Goto Ken-ichi

  Fujitsu Laboratories Ltd.

• MINAKATA Hiroshi

  Fujitsu Laboratories Ltd.

• SUGII Tosihiro

  Fujitsu Laboratories Ltd.

関連論文

• Analysis and modeling of size dependent mobility enhancement due to mechanical stress
• Fabrication and Delay Time Analysis of Deep Submicron CMOS Devices
• Ti Salicide Process for Subquarter-Micron CMOS Devices (Special Issue on Quarter Micron Si Device and Process Technologies)
• Effect of Silicon Surface Conditions before Cobalt-Silicidation on Ultra Shallow p^+-n Junction Properties
• Effect of Cap-Metals on Co Salicide Process

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