Behavior of Transconductance and Drive Current of Decoupled Plasma Nitridation Oxynitrides

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-06-15

著者

• Luo Tien-ying

  Technology Solutions Freescale Semiconductor Inc.

• LIM Sang

  Technology Solutions, Freescale Semiconductor Inc.

関連論文

• Behavior of Transconductance and Drive Current of Decoupled Plasma Nitridation Oxynitrides
• Optimization of Annealing Process of Pulsed RF Decoupled Plasma Nitridation Oxynitrides
• Behavior of Transconductance and Drive Current of Decoupled Plasma Nitridation Oxynitrides

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