New Plasma Surface Treatment for Wire Bonding Process : Effect of Sublimation with Alkyl Group Radicals

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概要

• 論文の詳細を見る
• 2001-09-25

著者

• TSUJI Osamu

  SAMCO International Inc.

• TATSUTA Toshiaki

  SAMCO International Inc.

• Yamazoe Hiroshi

  Samco International Inc.

• Tsuji Osamu

  Samco International Co. Ltd.

• HONSHO Kazuhiro

  Samco International Inc.

• TERAI Hirokazu

  Samco International Inc.

• Tatsuta Toshiaki

  SAMCO INTERNATIONAL Co., Ltd.

関連論文

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• Improvement in Homogeneity and Ferroelectric Property on Mist Deposition Derived Pb(Zr, Ti)O_3 Thin Films by Substrate Surface Treatment
• Optimization of Amorphous Carbon-Deposited Antireflective Layer for Advanced Lithography
• New Plasma Surface Treatment for Wire Bonding Process : Effect of Sublimation with Alkyl Group Radicals
• A New Plasma Process for Surface Treatment prior to Wire Bonding that Utilizes the Sublimation Effect of Alkyl Group Radicals

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