Optimization of Amorphous Carbon-Deposited Antireflective Layer for Advanced Lithography
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概要
- 論文の詳細を見る
Critical dimension variation due to the multiple interference effect is the greatest problem for improving the actual resolution limit in optical lithography. To overcome this problem, amorphous carbon-deposited antireflective layer has been developed. This paper reports on the results of optimization for the antireflective layer film and application to advanced lithography. First, we optimized the deposition process of antireflective layer by measuring the reflectivity. Second, we applied the antireflective layer films in i-line (365 nm) and KrF excimer laser (248 nm)lithography. With the antireflective layer films, the reflectivity from the substrate reduces to less than 20%, which leads to a multiple interference effect of less than 1/7. With optimized antireflective layer films, resolution and depth-of-focus are almost same as those of the films without antireflective layer.
- 社団法人応用物理学会の論文
- 1993-12-30
著者
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Sawai Mikio
Research & Development Center Samco International Inc
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TSUJI Osamu
SAMCO International Inc.
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TATSUTA Toshiaki
SAMCO International Inc.
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Tsuji O
Samco International Co. Ltd.
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Mito Hideaki
Kyoto Research Laboratory Matsushita Electronics Corporation
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TODOKORO Yoshihiro
Kyoto Research Lab., Matsushita Electronics Corp.
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Tani Y
Ryukoku Univ. Shiga Jpn
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Todokoro Yoshihiro
Kyoto Research Laboratory Matsushita Electronics Corporation
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Todokoro Yoshihiro
Kyoto Research Lab. Matsushita Electronics Corporation
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TANI Yoshiyuki
Kyoto Research Laboratory, Matsushita Electronics Corporation
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OKUDA Yoshimitsu
Kyoto Research Laboratory, Matsushita Electronics Corporation
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SAWAI Mikio
SAMCO International Inc.
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Tani Yoshiyuki
Kyoto Research Laboratory Matsushita Electronics Corporation
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Tsuji O
Samco International Inc. Kyoto Jpn
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Tsuji Osamu
Samco International Co. Ltd.
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Okuda Yoshimitsu
Kyoto Research Laboratory Matsushita Electronics Corporation
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Tatsuta T
Samco International Co. Ltd.
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Tatsuta Toshiaki
SAMCO INTERNATIONAL Co., Ltd.
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