Electrical Properties of and Conduction Mechanism in Ultrathin ZrO_2 Films on Si_<1-y>C_y Heterolayers

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-06-15

著者

• Patil S

  Institute Of Physics

• DALAPATI Goutam

  Department of Electronics & ECE

• SAMANTA Santanu

  Department of Electronics & ECE

• CHATTERJEE Somenath

  Department of Electronics & ECE

• BOSE Probir

  Department of Mechanical Engineering, Jadavpur University

• VARMA Shikha

  Institute of Physics

• PATIL Shivprasad

  Institute of Physics

• MAITI Chinmay

  Department of Electronics & ECE

関連論文

• Electrical Properties of and Conduction Mechanism in Ultrathin ZrO_2 Films on Si_C_y Heterolayers
• Structural and electrical properties of radio frequency sputtered HfTaOx films for high-k gate insulator
• Electrical Properties of and Conduction Mechanism in Ultrathin ZrO2 Films on Si1-yCy Heterolayers

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