Synthesis and Thermal Conductivity Measurement of High-Integrity Ultrathin Oxygen-Implanted Buried Oxide Layers
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-30
著者
-
He Ping
Institute Of Microelectronics Tsinghua University
-
Chen J
Ion Beam Laboratory Shanghai Institute Of Microsystem And Information Technology Chinese Academy Of
-
DONG Yemin
Ion Beam Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy o
-
CHEN Jing
Ion Beam Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy o
-
CHEN Meng
Ion Beam Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy o
-
WANG Xi
Ion Beam Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy o
-
TIAN Lilin
Institute of Microelectronics, Tsinghua University
-
LIU Litian
Institute of Microelectronics, Tsinghua University
-
LI Zhijian
Institute of Microelectronics, Tsinghua University
関連論文
- Synthesis and Thermal Conductivity Measurement of High-Integrity Ultrathin Oxygen-Implanted Buried Oxide Layers
- Scale Transformation Method in Self-Consistent Solution of Schrodinger and Poisson Equations
- Synthesis and Thermal Conductivity Measurement of High-Integrity Ultrathin Oxygen-Implanted Buried Oxide Layers