Preparation of (100)- and (111)-Textured Pb(Zr,Ti)O3 Piezoelectric Films and Direct Measurement of Their Piezoelectric Constants
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概要
- 論文の詳細を見る
A novel bending method is proposed to measure the piezoelectric constant $e_{31}$ of piezoelectric thin films, in which strain and strain-induced charges are recorded simultaneously using a strain gauge and a charge integrator. Two kinds of lead zirconate titanate (PZT) films with (100) and (111) textures were prepared using the sol-gel process and their $e_{31}$ was measured using the proposed technique. Reasonable $e_{31}$ values of $-6.0$ and $-6.9$ C/m2 were obtained for the cross-plane-poled films with (100) and (111) textures respectively, whereas both as-deposited films exhibited the same low $e_{31}$ of $-0.2$ C/m2.
- Japan Society of Applied Physicsの論文
- 2003-12-01
著者
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Li Jing-feng
State Key Laboratory Of New Ceramics And Fine Processing Department Of Materials Science And Enginee
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LI Longtu
State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engine
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Li Longtu
State Key Laboratory Of New Ceramics And Fine Processing Department Of Materials Science And Enginee
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GUI Zhilun
State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engine
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Gong Wen
State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engine
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Chu Xiangcheng
State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engine
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Gong Wen
State Key Laboratory Of New Ceramics And Fine Processing Department Of Materials Science And Enginee
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Gui Zhilun
State Key Laboratory Of New Ceramics And Fine Processing Department Of Materials Science And Enginee
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Chu Xiangcheng
State Key Laboratory Of New Ceramics And Fine Processing Department Of Materials Science And Enginee
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Li Longtu
State Key Lab of New Ceramics and Fine Processing, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
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