Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors
スポンサーリンク
概要
- 論文の詳細を見る
The flow-induced vibration of the microcantilever is investigated. In particular, to avoid flow disturbance resulting from size of measuring probe, we use the monolithic boron-doped piezoresistive microsensors. By characterizing the dynamic behavior of the microcantilever, the new micromechanics is experimentally determined, completely different from the conventional mechanics in the flow-induced vibration.
- 社団法人 電気学会の論文
- 2003-11-01
著者
-
Shoji Shuichi
Major In Nanoscience And Nanoengineering Waseda University
-
Shoji S
Waseda University
-
Shoji S
Waseda Univ. Tokyo Jpn
-
Shoji Shuichi
Department Of Science And Engineering Waseda University
-
Shoji Shuichi
Waseda University
-
Shoji Shuichi
Department Of Electrical Engineering And Bioscience Waseda University
-
GO Jeung
Department of Electrical Engineering and Bioscience, Waseda University
-
Go Jeung
Department Of Electrical Engineering And Bioscience Waseda University
関連論文
- Au-Electrode-Embedded Cyclo-Olefin Polymer Microchip Using Low-Temperature Direct Bonding
- Low-temperature Direct Bonding of Poly(methyl methacrylate) for Polymer Microchips
- Simplified 20-μm Pitch Vertical Interconnection Process for 3D Chip Stacking
- Fabrication of Metallic Nanopatterns Using the Vacuum Type UV-NIL Equipment
- Monitoring Cellular Events in Living Mast Cells Stimulated with an Extremely Small Amount of Fluid on a Microchip
- Improved Passive Cell Distributing Method for Micro Cellular Diagnostic Well Array
- Multiple Flow Switch Using Stepwise Sheath Flow
- High Sensitive X-ray Microcalorimeter Using Bi-Au Microabsorber for Imaging Applications
- TESを用いた高分解能X線マイクロカロリーメータの開発
- Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors
- Fabrication of Polymer and Metal Three-Dimensional Micromesh Structures
- An Experimental Study on Relative Displacement Sensing Using Phototransistor Array for Building Structures
- Digital Sorting of Flow-through Droplet Phase Microfluid
- Development of Lateral Displacement Sensor for Real-Time Detection of Structural Damage
- 3J1012 Gタンパク質共役受容体に対するペプチドリガンド探索を目指した高感度オンチップセルソーターの開発(3J バイオエンジニアリング1,日本生物物理学会第49回年会)
- Low-Temperature Au--Au Bonding Using Nanoporous Au--Ag Sheets