Integration of High Performance CMOS Logic LSI by Applying Cu Wiring to SiLK^<T. M.>/SiO_2 Hybrid Structure
スポンサーリンク
概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2002-07-01
著者
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木村 恒久
京都大学大学院 農学研究科 森林科学専攻
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Satoh Takefumi
北里大学 医学部泌尿器科学
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Ikeda Masanobu
Manufacturing Technology Development Division Electronic Device Group Fujitsu Limited
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Yano Ei
Inorganic Materials And Polymer Laboratory Fujitsu Laboratories Limited
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Kimura T
Device Fabrication Analysis Laboratory Fujitsu Laboratories Limited
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WATANABE Kenichi
Manufacturing Technology Development Division, Electronic Device Group, FUJITSU Limited
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KOTANI Yoshiyuki
Manufacturing Technology Development Division, Electronic Device Group, FUJITSU Limited
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KAWANO Michiari
Manufacturing Technology Development Division, Electronic Device Group, FUJITSU Limited
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MORI Hiroko
LSI Quality Assurance Division, Electronic Device Group, FUJITSU Limited Mizono
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KIMURA Takahiro
Device Fabrication Analysis Laboratory, FUJITSU Laboratories Limited
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SUZUKI Takashi
LSI Materials Development Department, C Project, FUJITSU Laboratories Limited
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SHIMIZU Noriyoshi
LSI Materials Development Department, C Project, FUJITSU Laboratories Limited
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NAKAMURA Tomoji
LSI Materials Development Department, C Project, FUJITSU Laboratories Limited
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SUGIURA Iwao
Inorganic Materials and Polymer Laboratory, FUJITSU Laboratories Limited
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TABUCHI Kiyotaka
LSI Technology Development Division, Semiconductor Network Company, SONY Corporation
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HASEGAWA Toshiaki
LSI Technology Development Division, Semiconductor Network Company, SONY Corporation
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KADOMURA Shingo
LSI Technology Development Division, Semiconductor Network Company, SONY Corporation
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Suzuki T
Fujitsu Laboratories Ltd. Akiruno Technology Center
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SUGIURA Iwao
Fujitsu Laboratories Ltd.
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Kadomura Shingo
Lsi Technology Development Division Semiconductor Network Company Sony Corporation
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Nakamura Tomoji
Fujitsu Laboratories Ltd. Akiruno Technology Center
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Nakamura Tomoji
Lsi Materials Development Department Fujitsu Akiruno Technology Center
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Kawano Michiari
Manufacturing Technology Development Division Electronic Device Group Fujitsu Limited
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Kunishima Yasuharu
Department Urology Sapporo Medical University School Of Medicine
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Kotani Yoshiyuki
Manufacturing Technology Development Division Electronic Device Group Fujitsu Limited
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Shimizu Noriyoshi
Lsi Materials Development Department C Project Fujitsu Laboratories Limited
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Mori Hiroko
Lsi Quality Assurance Division Electronic Device Group Fujitsu Limited Mizono
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Tabuchi Kiyotaka
Lsi Technology Development Division Semiconductor Network Company Sony Corporation
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Hasegawa Toshiaki
Lsi Technology Development Division Semiconductor Network Company Sony Corporation
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Kimura Takahiro
Device Fabrication Analysis Laboratory Fujitsu Laboratories Limited
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Watanabe Kenichi
Manufacturing Technology Development Division Electronic Device Group Fujitsu Limited
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