Fabrication and Sensing Behavior of Piezoelectric Microcantilever for Nanobalance

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概要

• 論文の詳細を見る

• The fabrication and analysis of a cantilever microtransducer were performed for a mass-detecting device. We designed piezoelectric microcantilever arrays with various lengths and shapes to investigate their resonance properties and sensitivity. Finite element method (FEM) simulation was carried out to estimate the resonant property of the microcantilever. A multilayered piezoelectric microcantilever has been successfully fabricated using micro-electromechanical systems (MEMS) processing. The microcantilever employs a sol-gel derived Pb(Zr0.52Ti0.48)O3 (PZT) capacitor fabricated on a low-stress SiNx layer. The microcantilever showed a natural resonant frequency of 16–26 kHz. The microcantilever exhibited a mass sensitivity of 34.1 Hz/ng, which enables its application to nanobalance, i.e., to detect biomolecules or gas molecules in a nanogram regime.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-09-15

著者

• LEE Jaichan

  Department of Materials Science and Engineering, Sung Kyun Kwan University

• Lee Jaichan

  Department Of Materials Engineering Sungkyunkwan University

• Lee Jaichan

  Department Of Materials Science And Engineering Sung Kyun Kwan University

• Shin Sanghun

  Department of Materials Science and Engineering, Sung Kyun Kwan University, Suwon, 440-746, Korea

• Song Sangguen

  Department of Materials Science and Engineering, Sung Kyun Kwan University, Suwon, 440-746, Korea

• Lee Youngsik

  Department of Materials Science and Engineering, Sung Kyun Kwan University, Suwon, 440-746, Korea

• Lee Naeung

  Department of Materials Science and Engineering, Sung Kyun Kwan University, Suwon, 440-746, Korea

• Park Joonshik

  Korea Electronics Technology Institute, Pyung Taek-Si, KyungGi-Do 451-865, Korea

• Park Hyoderk

  Korea Electronics Technology Institute, Pyung Taek-Si, KyungGi-Do 451-865, Korea

• Park Hyoderk

  Korea Electronics Technology Institute

• Shin Sanghun

  Department Of Materials Science And Engineering Sung Kyun Kwan University

• Lee Youngsik

  Department Of Materials Science And Engineering Sung Kyun Kwan University

• Park Joonshik

  Korea Electronics Technology Institute

• Song Sangguen

  Department Of Materials Science And Engineering Sung Kyun Kwan University

• Shin Sanghun

  Department of Electronic Engineering, Kyung-Won University

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• Fabrication and Sensing Behavior of Piezoelectric Microcantilever for Nanobalance
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• Thickness Dependent Dielectric Property of BaTiO3/SrTiO3 Artificial Lattice

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