Patterned Pyroelectric Electron Emitters and their Feasibility Study for Lithography Applications
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-06-15
著者
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Ko Tae
Department Of Electrical And Electronic Engineering Yonsei University
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MOON Chang-Wook
Samsung Advanced Institute of Technology
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KIM Dong-Wook
Samsung Advanced Institute of Technology
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ROSENMAN G.
Department of Electrical Engineering-Physical Electronics, Tel Aviv University
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YOO In
Samsung Advanced Institute of Technology
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Rosenman G.
Department Of Electrical Engineering-physical Electronics Tel Aviv University
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