Operation of a CSL Gauge in Extremely High Vacuum

概要

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The operation of a “cascade static lens gauge” (CSLG) was studied in a new extremely high-vacuum system. In the gauge, electrons emitted from a hot cathode oscillate many times in a lens system which is installed between the cathode and an ion collector. The potentials of the lens electrodes, which were apertured disks, were determined by computer simulation and from preliminary experiments. The sensitivity of about 90 Pa<SUP>-1</SUP> was obtained with an emission current of 0.55 μA. The linearity was confirmed in the measured pressure region. Soft X-ray photocurrent and ESD ion current were below our detection limit due to the small emission current, but the low-pressure measurement in the extremely high vacuum was not easy because outgassing from the lens electrodes could not be neglected in spite of the small emission current.
日本真空協会の論文
1994-09-20