Concept and Computer Study of a New CSL Gauge

概要

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The cascade static lens gauge (CSLG) has a lens system in which electrons oscillate many times, generating ions with a high probability. In a preliminary work using a prototype (CSLG-1), a sensitivity higher than 80 Pa<SUP>-1</SUP> was obtained with emission current of 0.55μA. In the experiments in XHV, however, the effects of outgassing from the working electrodes were not negligible, and the design of a new gauge (CSLG-2) was started. In the new gauge, the lens system is composed of ring electrodes installed in line instead of the apertured disks used in CSLG-1, and the rings can be heated by passing an electric current through them directly or by electron bombardment. In the computer simulation study, the electron stably oscillates more than 10000 times, and high performance is expected.
日本真空協会の論文
1994-09-20