ハロゲンによるSi(100)-2×1表面のエッチング

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概要

著者

中山幸仁
Department Of Materials Science & Chemical Engineering University Of Minnesota
ALDAO Celso
Institute of Materials Science and Technology, Unicversidad Nacional de Mar del Plata-CONICET
WEAVER John
Department of Materials Science & Chemical Engineering, University of Minnesota
Aldao C
Univ. Nacional De Mar Del Plata Mar Del Plata Arg
Aldao Celso
Institute Of Materials Science And Technology Unicversidad Nacional De Mar Del Plata-conicet
Weaver John
Department Of Materials Science & Chemical Engineering University Of Minnesota
ALDAO Celso
Institute of Materials Science and Technology (INTEMA), Universidad Nacional de Mar del Plata-CONICET

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