Mass and Energy Analyses of Substrate-incident Ions in TiO_2 Deposition by RF Magnetron Sputtering
スポンサーリンク
概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-01-01
著者
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Shibata A
Taiko Tec Co. Osaka Jpn
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OKIMURA Kunio
Fukui National College of Technology
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SHIBATA Akira
Fukui National College of Technology
関連論文
- Mass and Energy Analyses of Substrate-incident Ions in TiO_2 Deposition by RF Magnetron Sputtering
- Preparation of Rutile TiO_2 Films by RF Magnetron Sputtering
- Enantioselective Hydrogenation of(E)-α-Phenylcinnamic Acid on Pd/TiO_2 Catalyst Modified by Cinchona Alkaloids:Effect of Modifier Structure
- Reinvestigation of Decarboxylation Kinetics from the Hydrogencarbonatocobalt(III) Intermediate
- Role of He Gas Mixture on the Growth of Anatase and Rutile TiO_2 Films in RF Magnetron Sputtering
- Deposition of TiO_2 Films by Reactive Sputtering in Magnetic Field
- Deposition of High-Quality TiO 2 Films by RF Magnetron Sputtering with an Auxiliary Permanent Magnet